Издатель: Pleiades Publishing, Ltd.
Ассоциированный русскоязычный журнал: Микроэлектроника
ISSN PRINT: 1063-7397
ISSN ONLINE: 1608-3415
Russian Microelectronics covers physical, technological, and some VLSI and ULSI circuit-technical aspects of microelectronics and nanoelectronics; it informs the reader of new trends in submicron optical, x-ray, electron, and ion-beam lithography technology; dry processing techniques, etching, doping; and deposition and planarization technology. Significant space is devoted to problems arising in the application of proton, electron, and ion beams, plasma, etc. Consideration is given to new equipment, including cluster tools and control in situ and submicron CMOS, bipolar, and BICMOS technologies. The journal publishes papers addressing problems of molecular beam epitaxy and related processes; heterojunction devices and integrated circuits; the technology and devices of nanoelectronics; and the fabrication of nanometer scale devices, including new device structures, quantum-effect devices, and superconducting devices. The reader will find papers containing news of the diagnostics of surfaces and microelectronic structures, the modeling of technological processes and devices in micro- and nanoelectronics, including nanotransistors, and solid state qubits.
The journal is intended for specialists at research institutes, universities, and other educational establishments; for graduate students; and, to a certain extent, for those working at industrial laboratories.
CNKI, Chemical Abstracts Service (CAS), Current Contents Collections / Electronics & Telecommunications Collection, Dimensions, EBSCO Academic Search, EBSCO Applied Science & Technology Source, EBSCO Computers & Applied Sciences Complete, EBSCO Discovery Service, EBSCO Engineering Source, EBSCO STM Source, EI Compendex, Google Scholar, INSPEC, Institute of Scientific and Technical Information of China, Japanese Science and Technology Agency (JST), Naver, OCLC WorldCat Discovery Service, ProQuest Central, ProQuest Engineering, ProQuest Materials Science and Engineering Database, ProQuest SciTech Premium Collection, ProQuest Technology Collection, ProQuest-ExLibris Primo, ProQuest-ExLibris Summon, SCImago, SCOPUS, TD Net Discovery Service, UGC-CARE List (India), WTI Frankfurt eG.
117218 Москва, Нахимовский проспект, 36, корп. 1, ФТИАН.
Тел.: +7 (499) 129-5446
Факс: +7 (499) 129-3141
© Pleiades Publishing , 2021