Vol. 52, No. 1, 2023

Russian Microelectronics

Editorial

15th International Conference on Micro- and Nanoelectronics October 2–6, 2023 Zvenigorod, Moscow Region, Russia

Devices: Transistors

Natural Edge Bilayer Graphene Transistor

I. K. Domaratskiy, M. A. Kashchenko, V. A. Semkin, D. A. Mylnikov, E. I. Titova and D. A. Svintsov p. S2 abstract

Accounting for Carrier Mobility Reduction due to the Normal Field in the Saturation Current Modeling of Extrinsic MOSFETs

V. O. Turin, Y. V. Ilyushina, M. A. Shcherbina, B. A. Rakhmatov, G. I. Zebrev, S. A. Kokin and S. V. Makarov p. S6 abstract

Investigation of the Influence of the Buffer Layer Design in a GaN HEMT Transistor on the Breakdown Characteristics

D. M. Kurbanbaeva, A. V. Lashkov and K. A. Tsarik p. S14 abstract

Calculation of Electrophysical Characteristics of Semiconductor Quantum Wire Device Structures with One-Dimensional Electron Gas

D. V. Pozdnyakov, A. V. Borzdov and V. M. Borzdov p. S20 abstract

Devices: Memory

Memristors Based on GeSi_xO_y Glass Films on p+-Si Substrate

V. A. Volodin, I. D. Yushkov, G. N. Kamaev and M. Vergnat p. S30 abstract

Buffer Layers for Nonvolatile Ferroelectric Memory Based on Hafnium Oxide

A. A. Reznik, A. A. Rezvanov and S. S. Zyuzin p. S38 abstract

Devices: Superconductivity

Flux-Driven Traveling-Wave Parametric Amplifier with bi-SQUIDs Cells

V. K. Kornev, N. V. Kolotinskiy and A. N. Nikolaeva p. S44 abstract

Strontium Iridates as Barrier Materials for Josephson Heterostructures

Y. V. Kislinskii, K. Y. Constantinian, I. E. Moskal, N. V. Dubitskiy, A. M. Petrzhik, A. V. Shadrin and G.A. Ovsyannikov p. S53 abstract

Devices: Magnetics

Atypical Raman Scattering on Magnetic Junctions in Metallic Nanowires

V. Krishtop, V. Korepanov, L. Fomin, D. Zagorskiy and I. Doludenko p. S59 abstract

Magnetic Properties of Ni Nanowires in Porous Anodic Alumina Matrix

E. A. Grushevski, N. G. Savinski, O. S. Trushin and L. A. Shendrikova p. S67 abstract

Artificial Magnetism in Theory of Wave Multiple Scattering by Random Ensemble of Nonmagnetic Spheres with Negative Dielectric Permittivity

M. Yu. Barabanenkov and A. G. Italyantsev p. S71 abstract

Devices: Photonics

New Applications of Thermomigration in Semiconductor Technologies and Optoelectronics Developments (Review)

E. Yu. Buchin and Yu. I. Denisenko p. S76 abstract

Photovoltaic Effect in ITO/Germanosilicate Glass/Si Structures

V. A. Volodin, G. N. Kamaev, Ghaithaa A. Hamoud, I. D. Yushkov and M. Vergnat p. S84 abstract

Nanophotonics Devices Functioned in Frame of the X-ray Waveguide-Resonance Propagation Phenomenon

V. Egorov and E. Egorov p. S92 abstract

Optical Properties of ZnO–LiNbO₃ and ZnO–LiNbO₃:Fe Structures

Sh. B. Utamuradova, Z. T. Azamatov and M. A. Yuldoshev p. S99 abstract

Interaction of Electromagnetic Radiation with a Semiconductor Nanolayer in the Case of an Arbitrary Rotation Axis Orientation of an Constant Energy Ellipsoid

O. V. Savenko and I. A. Kuznetsova p. S104 abstract

2D Geometrical Parameters of Asymmetric Plasmonic Crescent-Shaped Nanostructures Fabricated with Colloidal Nanolithography

V. P. Kudrya p. S110 abstract

Devices: MEMS and Sensors

Finite-Element Simulation of the Performance of a Temperature-Compensated Membrane-Based Thermal Flow Sensor

V. Koshelev, G. Demin, N. Dyuzhev, M. Chinenkov and V. Ryabov p. S115 abstract

Simulation of the Silicon Sensitive Element of Capacitive Accelerometer Using the Analytical Model

Paing Soe Thu, V. V. Kalugin and E. S. Kochurina p. S121 abstract

Modeling of Heat Transfer for a Three-Dimensional Microelectromechanical Mirror Element with Consideration of Its Packaging Features

S. S. Evstafyev, V. K. Samoylikov and D. V. Vertyanov p. S129 abstract

Analysis of the Electrophysical Characteristics of the RF MEMS Switch Taking into Account the Influence of the Substrate Material

I. O. Dryagin, A. M. Belevtsev, I. K. Epaneshnikova, V. L. Kryuchkov and V. F. Lukichev p. S134 abstract

Piezoelectric Properties of Nitrogen-Doped Carbon Nanotubes Grown on Refractory Metal Electrodes

O. I. Soboleva, S. A. Khubezhov, M. R. Polyvianova, O. I. Il'in and M. V. Il'ina p. S139 abstract

Devices: THz

Terahertz All-Dielectric Metalens: Design and Fabrication Features

E. Yu. Gusev, V. S. Klimin, S. P. Avdeev, P. E. Kislyak, R. A. Gaidukasov, S. Wang, Z. Wang, X. Ren, D. Chen, L. Han, W. Zhang and O. A. Ageev p. S145 abstract

Investigation of the Characteristics of a Wireless Communication System Consisting of Metal Nanoantennas in 50 µM TSV Channel

D. A. Serov and I. A. Khorin p. S151 abstract

Devices: Neuromorphic Systems

Development of a Mathematical Apparatus with an Imagery Representation of Information for Neuromorphic Systems

N. A. Simonov p. S159 abstract

Technologies: General Processes

Informational Analytical Platform for Operating the Technological Route of Manufacturing of Microelectronic Devices

K. S. Balizh, A. V. Dobrodeev, N. V. Ermakov, I. A. Orlov and E. A. Simakhina p. S163 abstract

Technological Approaches for Formation of High-Density Integral Capacitors: Deep Etching and Atomic Layer Deposition

A. Miakonkikh, S. Pankratov, V. Kuzmenko and K. Rudenko p. S168 abstract

Sublimation Mechanism for Polishing Silicon Carbide Wafers by Electron Beam

A. Atamanchuk, S. Avdeev, E. Gusev and O. Ageev p. S176 abstract

Simulating Longitudinal Temperature Bistability in a Silicon Wafer during Thermal Treatment in a Lamp Chamber

V. V. Ovcharov, V. P. Prigara and A. L. Kurenya p. S179 abstract

Technologies: Thin Films

Computer Modeling of Plasma-Enhanced Atomic Layer Deposition of HfO₂ and ZrO₂

S. S. Zyuzin, E. A. Ganykina, A. A. Rezvanov, Ya. G. Zasseev, V. A. Gvozdev and E. S. Gornev p. S184 abstract

Ion-Assisted Magnetron Deposition of AlN Films

R. V. Selyukov and V. V. Naumov p. S194 abstract

Effect of Vacuum Annealing on Orientation of Fluorite Films on Tilted-Axes Substrates

P. B. Mozhaev, J. B. Hansen and C. S. Jacobsen p. S199 abstract

Electrostatic-Assisted Ultrasonic Spray-Coating for Nanotechnology Applications

V. Petukhov, N. Struchkov and V. Nevolin p. S209 abstract

Technologies: Metallization

Ruthenium for Subtractive and Semi-Damascene Processes of Interconnects Formation

A. Rogozhin, A. Miakonkikh and K. Rudenko p. S215 abstract

Rhenium Effect in Thin Films and Wires of Tungsten–Rhenium Alloys

A. V. Timakov and V. I. Shevyakov p. S220 abstract

Investigation of the Features of Metallization Formation for N-MOS Transistor Structures with a Vertical Channel

V. S. Gornostay-Polsky and V. I. Shevyakov p. S224 abstract

Technology of Metallization of the Structure of a Semiconductor Device by a Composition of Nanosized Metal Layers

A. R. Shakhmayeva and E. Kazalieva p. S228 abstract

Effect of Surfactant and Solvent on the Pore Structure of Organosilica Glass Film

D. S. Seregin, A. S. Vishnevskiy, D. A. Vorotyntsev, P. A. Mokrushev and K. A. Vorotilov p. S232 abstract

Investigation of Gas Condensation in Pores of Nanoporous Dielectrics in Cryogenic Etching Conditions

R. A. Gaidukasov and A. V. Miakonkikh p. S240 abstract

Diagnostics

Proposals for Development of the Prospective System for Optical Quality Control of the Assembly of Microelectronic Devices

K. S. Balizh, P. M. Eremeev and E. A. Simakhina p. S246 abstract

Research and Analysis of Thermomechanical Stresses in the Structure of a Wafer with Embedded ICs with Consideration of Temperature Effects in Manufacturing Process Route

S. S. Evstafyev, I. A. Solovyov, M. D. Kochergin and D. V. Vertyanov p. S251 abstract

Study of Topographic Features, Shape, and Mechanical Stresses in Microelectronic Structures Using Geomorphometric Techniques

A. A. Dedkova and I. V. Florinsky p. S257 abstract

Digital Shearograph for Detecting Defect in Materials

Z. T. Azamatov, V. E. Gaponov, A. A. Jeenbekov and A. B. Bakhromov p. S263 abstract

Ion Beams and X-ray Methods for the Planar Nanostructures Diagnostics

V. Egorov and E. Egorov p. S267 abstract

Investigation of Low Energy Electron Irradiated SiO₂ Based MOS Devices by Capacitance-Voltage and Thermally Stimulated Current Techniques

R. Aliasgari Renani, O. A. Soltanovich, M. A. Knyazev and S. V. Koveshnikov p. S274 abstract

Technique of Time Depend Dielectric Breakdown for the Wafer-Level Testing of Thin Dielectrics of MIS Devices

D. V. Andreev, V. M. Maslovsky and V. V. Andreev p. S279 abstract

Some Properties of Argon as an Actinometric Atom. I. Metastable Levels Excitation

V. P. Kudrya p. S285 abstract

Some Properties of Argon as an Actinometric Atom. II. Metastable Levels Quenching

V. P. Kudrya p. S290 abstract

Quantum Informatics: Physics

A Mass-in-Mass Chain and the Generalization of the Dirac Equation with an Eight-Component Wave Function and with Optical and Acoustic Branches of the Dispersion Relation

V. O. Turin, Y. V. Ilyushina, P. A. Andreev, A. Yu. Cherepkova, D. D. Kireev and I. V. Nazritsky p. S299 abstract

Quantum Informatics: Communication

Polarization Dynamics and Intensity Fluctuations of a Single-Mode Vertical Cavity Laser with Optical Feedback

V. N. Chizhevsky, M. V. Lahmitski, E. Dedkov, R. Shakhovoy, V. Kurochkin and S. Ya. Kilin p. S306 abstract

Simulation of the Polarization-Resolved Spectra of VCSEL

E. A. Dedkov, V. L. Kurochkin, V. N. Chizhevsky, M. V. Lahmitski, S. Ya. Kilin and R. A. Shakhovoy p. S311 abstract

Blockwise Maximization of the Secret Key with Signal Breaks in Satellite-Based Quantum Key Distribution

E. Ivchenko, A. Chernov, A. Khmelev and V. Kurochkin p. S317 abstract

Modeling and Improving the Transmission Efficiency of an Optical Beam Splitter Made of Silicon Nitride Si₃N₄

V. Boldysheva, L. Gilyazov and N. Arslanov p. S322 abstract

Peculiarities of Generation of Broadband Two-Photon States in Lithium Niobate Nanowaveguide

O. A. Ermishev, M. A. Smirnov and N. M. Arslanov p. S327 abstract

Post-Processing of Random Number Generator in InGaAs Contact Photodiode Homodyne Circuit Based on Continuous Wavelet Transform to Improve NIST Longest Run Test Pass Rate

D. A. Mavkov, M. E. Sibgatullin, L. R. Gilyazov and N. M. Arslanov p. S332 abstract

Quantum Informatics: Computing

Nonequilibrium Diagram Technique Applied to the Electronic Transport via Tightly Bound Localized States

I. D. Kopchinskii and V. V. Shorokhov p. S337 abstract

A Method to Compute QAOA Fixed Angles

A. Yu. Chernyavskiy and B. I. Bantysh p. S352 abstract

Correction of Quantum State Readout Statistics Using the Fuzzy Measurements Model

I. A. Dmitriev, Yu. I. Bogdanov, B. I. Bantysh, N. A. Bogdanova and V. F. Lukichev p. S357 abstract

High-Precision Quantum Measurements of Qudits Taking into Account the Influence of Amplitude and Phase Relaxation

K. B. Koksharov, Yu. I. Bogdanov, N. A. Bogdanova, Yu. A. Kuznetsov and V. F. Lukichev p. S363 abstract

Hybrid Atom-Ion Quantum Gate Engineering

D. Shaposhnikov and L. Fedichkin p. S369 abstract

Generator of Electromagnetic Pulses by an Array of Josephson Qubits with Hybrid Coupling to a Resonator

A. A. Semenov and A. M. Satanin p. S373 abstract

Quantum Algorithm for Searching of Two Sets Intersection

K. Khadiev and E. Krendeleva p. S379 abstract

Quantum Circuit for Random Forest Prediction

L. Safina, K. Khadiev, I. Zinnatullin and A. Khadieva p. S384 abstract

Efficient Implementation of Amplitude Form of Quantum Hashing Using State-of-the-Art Quantum Processors

I. Zinnatullin, K. Khadiev and A. Khadieva p. S390 abstract

Enhancing Efficiency of the Fast Quantum Memory on Single-Atom in Cavity

Yu. A. Kharlamova, N. M. Arslanov and S. A. Moiseev p. S395 abstract

Constant-Depth Algorithm for Quantum Hashing

A. Vasiliev p. S399 abstract

Generation of Nonmaximally Entangled States between BECs with Quantum Optimal Control Methods

I. D. Lazarev and A. N. Pyrkov p. S403 abstract

Comparative Study of LQU and LQFI Measures of Quantum Correlations in Two-Spin-1/2 Heisenberg Systems

M. A. Yurischev p. S412 abstract

Quantum Control by the Environment: Turing Uncomputability, Optimization over Stiefel Manifolds, Reachable Sets, and Incoherent GRAPE

A. N. Pechen p. S419 abstract

Incoherent GRAPE for Optimization of Quantum Systems with Environmentally Assisted Control

V. Petruhanov and A. Pechen p. S424 abstract

Quantum Control Landscapes and Traps

B. O. Volkov and A. N. Pechen p. S428 abstract

Contents