Contents

Russian Microelectronics

Vol. 54, No. 8, 2025

EDITORIAL

Editorial

V. F. Lukichev and K. V. Rudenko p. 827  abstract

MICRO- AND NANOELECTRONICS: STRUCTURES AND DEVICES

UTBB SOI-Structures with Local TR-HR Ultrahigh-Resistance Layers for Radio-Photonic Integrated Circuits

V. P. Popov, V. E. Zhilitskii, V. A. Antonov, L. N. Safronov, A. V. Miakonkikh, and K. V. Rudenko p. 828  abstract

Deposition and Etching of Ruthenium for Promising Metallization Systems of Integrated Circuits

A. V. Miakonkikh, V. O. Kuzmenko, and A. E. Rogozhin p. 836  abstract

Charge Transport in MIS Structures ITO/[GeOx](z)[SiO2](1–z)/Si

I. Yushkov, A. Gismatulin, G. Kamaev, M. Vergnat, and V. A. Volodin p. 842  abstract

Features and Functional Characteristics of Memristive Structures Based on Yttrium-Doped Zirconium Oxide

A. S. Vankaev, O. A. Soltanovich, E. V. Klyukina, I. N. Antonov, A. V. Kruglov, D. A. Pavlov, A. A. Sushkov, A. N. Mikhaylov, O. N. Gorshkov, and S. V. Koveshnikov p. 848  abstract

Gate-Tunable Planar TiO2/Graphene Memristor for Neuromorphic Computing

I. L. Jityaev, M. S. Kartel, Yu. Yu. Jityaeva, and V. A. Smirnov p. 859  abstract

Resistive Switching of Memristors Based on (CoFe)x(SiO2)100–x Nanocomposite and LiNbO3 Layers with Ni Electrode

S. N. Nikolaev, G. S. Nikolaev, A. V. Sitnikov, V. A. Demin, and V. V. Rylkov p. 873  abstract

Electroforming of Memristors Based on Open TiN–SiO2–Mo Sandwich Structures in a Moderate Regime

V. M. Mordvintsev and E. S. Gorlachev p. 878  abstract

Realization of Deterministic Multilevel Polarization States in Ferroelectric Hf0.5Zr0.5O2-Based Capacitors

N. Sizykh, M. Spiridonov, A. Khanas, and A. Zenkevich p. 886  abstract

Impedance Optimization of the Power Distribution Network in a Three-Dimensional Microassembly with Back Side Commutation

S. A. Batin, S. P. Semenov, D. V. Vertyanov, and S. P. Timoshenkov p. 892  abstract

Hybrid Memristor-CMOS System: Circuit Design Solutions for Control and Data Processing

A. A. Tokarev and I. A. Khorin p. 898  abstract

SIMULATION AND MODELING

Simulation of a Ballistic GAAFET Based on AlXGa1–XAs Quantum Wire

D. V. Pozdnyakov, A. V. Borzdov, and V. M. Borzdov p. 908  abstract

Simulation of a Tunnel Field-Effect Transistor with Sharp Source and Drain Schottky Barrier Contacts

I. Semenikhin, D. Svintsov, V. Vyurkov, K. Rudenko, and V. Lukichev p. 917  abstract

Mathematical Modeling of Charge Transport in the Dielectric Layer of a HfOx Memristor Taking into Account Single Charged Traps

D. R. Islamov, T. M. Zalyalov, V. A. Voronkovskii, A. K. Markelova, A. A. Pil’nik, T. V. Perevalov, M. N. Davydov, and A. A. Chernov p. 922  abstract

Accounting for Mobility Reduction, Body Effect, and Drift Velocity Saturation in the Extrinsic MOSFET Saturation Current Equation

V. O. Turin, O. V. Pronina, A. P. Rogov, V. A. Shcheglov, G. I. Zebrev, S. A. Kokin, S. V. Makarov, and B. A. Rahmatzoda p. 929  abstract

Development of a Methodology for Characterization the Effect of Local Mismatch of MOSFET Parameters

D. N. Mayfet, S. O. Belostotskaya, A. D. Rudenko, A. V. Shemyakin, and V. I. Shevyakov p. 936  abstract

Model of Accumulation of Surface States in p-MOS Transistors under Negative Bias

O. V. Aleksandrov and N. N. Morozov p. 941  abstract

Physics-Based Modeling of the Single Event Upset Critical Charge in Digital Electronics

A. A. Mateiko, A. S. Rodin, I. A. Makarova, E. N. Abramova, and G. I. Zebrev p. 948  abstract

Simulation of Field-Effect Transistors Based on Bilayer Graphene and Resonant-Tunneling Heterostructures Based on 2D Materials with Vertical Transport

I. I. Abramov, V. A. Labunov, and N. V. Kalameitsava p. 953  abstract

Plasmon Resonance in a Sub-THz Graphene-Based Detector: Theory and Experiment

I. M. Moiseenko, E. Titova, M. Kaschenko, and D. Svintsov p. 958  abstract

Terahertz Amplification and Lasing in a Metal Groove with Active Graphene

M. Yu. Morozov, K. V. Mashinsky, and V. V. Popov p. 963  abstract

Renormalization of the Plasmon Frequency in a Screened Graphene Square

D. V. Fateev, A. A. Shamarina, K. V. Mashinsky, and V. V. Popov p. 967  abstract

Propagation of Surface Plasma Oscillations along a Metal Nanolayer

O. V. Savenko and I. A. Kusnetsova p. 976  abstract

Parametric Resonance and Chaotic Phase Dynamics of a Two-Contact SQUID

D. P. Chernyshov and A. M. Satanin p. 984  abstract

Modeling the Growth of Chiral Nanostructures by Glancing Angle Deposition

M. M. Chebokhin and O. S. Trushin p. 989  abstract

Micromagnetic Modeling of Hexagonal Ensembles of High-Aspect Nanowires of Ferromagnetic Iron, Nickel, and Cobalt

E. A. Grushevsky, N. G. Savinski, and O. S. Trushin p. 995  abstract

Generalized Multilevel Model for Describing Magnetization Curves of Nanoparticles

A. V. Lobachev and M. A. Chuev p. 999  abstract

Spatial Filtering of Image Noise Based on the Spot Apparatus

N. A. Simonov p. 1008  abstract

OPTOELECTRONICS AND PHOTONICS

Full Stokes Resolution via a Single Photodetector with Geometrically Patterned Contacts

A. Shabanov, V. Semkin, V. Myltsev, M. Kashchenko, I. Domaratskiy, I. Mazurenko, and D. Svintsov p. 1016  abstract

Physically Relevant Merits of Two-Dimensional Subwavelength Photodetectors

D. Svintsov, D. Mylnikov, and A. Bocharov p. 1023  abstract

Design of Diffraction Gratings for Efficient Input–Output Interfaces in Thin-Film Lithium Niobate Photonic Integrated Circuits

G. A. Lemeshevskaya, P. V. Volkov, D. E. Nikolichev, A. I. Bobrov, A. V. Nezhdanov, L. M. Vinogradova, O. S. Vyazankin, E. I. Yurtova, K. V. Sidorenko, N. V. Malekhonova, and A. B. Chigineva p. 1031  abstract

Low Index-Contrast Photonic Crystal Nanobeam Resonator Based on PMMA on Silica Substrate

A. I. Garifullin, V. K. Boldysheva, O. A. Ermishev, and N. M. Arslanov p. 1037  abstract

Analysis of the Dispersion Properties of a Multimode Waveguide Made of Composite Polymer for the Generation of Two-Photon Quantum States of Light

O. A. Ermishev, V. K. Boldysheva, A. I. Garifullin, and N. M. Arslanov p. 1043  abstract

Propagation of Light Fluxes in a Symmetric Optical Fiber

V. K. Egorov and E. V. Egorov p. 1050  abstract

Perspective Chiral Metamaterials Based on Nanostructured Thin Films for Photonics and Biosensors

O. S. Trushin, I. S. Fattakhov, E. A. Grushevsky, A. A. Popov, L. A. Mazaletskiy, A. S. Fedorov, and M. V. Logunov p. 1057  abstract

Formation of All-Silicon Metasurfaces for Sensor Devices

V. S. Klimin, E. Yu. Gusev, V. V. Polyakov, H. Jiang, S. Wang, L. Jiang, Z. Wang, W. Zhang, and O. A. Ageev p. 1065  abstract

A Specific Wave of Electromagnetic Energy Accumulation in a Random Medium of Small Spherical Particles with Magnetic Dipole Mie Resonance

M. Yu. Barabanenkov and A. G. Italyantsev p. 1070  abstract

Frequency Dispersion of Dielectric Coefficients in Low-Dimensional TlGaSe2 and TlInSe2 Single Crystals

M. M. Asadov, S. N. Mustafaeva, and V. F. Lukichev p. 1080  abstract

Investigation of the Conduction Type of Nonstoichiometric Germanosilicate Glass Films

G. A. Hamoud, G. N. Kamaev, M. Vergnat, and V. A. Volodin p. 1088  abstract

Change in the Reflection of the a-Si Film on the Surface of Al–4%Cu/Si in the Visible Range during Low-Energy Sputtering in Argon Plasma

I. I. Amirov, M. O. Izyumov, and O. V. Morozov p. 1097  abstract

Electromagnetic-Induced Currents in a Triangular Cluster of Nanospheres

M. Yu. Barabanenkov, A. A. Sapegin, and A. A. Krylov p. 1102  abstract

MEMS AND ACTUATORS

Micromechanical RF Switch with Metal-to-Metal Contact

I. V. Uvarov, I. A. Belozerov, and M. O. Morozov p. 1108  abstract

A Reconfigurable RF MEMS Switch for Wireless Communication Systems

M. O. Morozov and I. V. Uvarov p. 1113  abstract

Finite Element Simulation of the MEMS Switch Contact Temperature

I. A. Belozerov and I. V. Uvarov p. 1119  abstract

Design of a Microwave Phase Shifter Based on a Microelectromechanical Varactor for Next-Generation Communication Systems

I. O. Dryagin, A. M. Belevtsev, I. K. Epaneshnikova, and V. L. Kryuchkov p. 1125  abstract

MEMS As Scientific Instruments: Precise Measurement of the Adhesion Energy with an Adhered Cantilever

A. V. Postnikov, I. V. Uvarov, P. S. Schlepakov, and V. B. Svetovoy p. 1132  abstract

Effect of Piezoelectric Layer on Resonant Frequency of Silicon MEMS Membranes

E. Yu. Gusev, S. V. Petrova, L. Jiang, V. S. Klimin, V. V. Polyakov, L. Han, S. Wang, Z. Wang, W. Zhang, and O. A. Ageev p. 1142  abstract

Increasing Performance of a Microactuator Based on a Hydrogen–Oxygen Mixture Explosion

P. S. Shlepakov, V. B. Svetovoy, and I. V. Uvarov p. 1147  abstract

Passive Microfluidic Valve with Reduced Threshold Pressure

P. S. Shlepakov, O. V. Morozov, and I. V. Uvarov p. 1150  abstract

The Influence of the Operating Temperature of the Sensitive Element of the Thermal Gas Flow Sensor on Its Output Characteristics

V. Koshelev, G. Demin, N. Dyuzhev, and V. Ryabov p. 1154  abstract

Development of a Method for Investigating Temperature Dependences of Apparent Acceleration in MEMS Accelerometer Operation and Application

L. Chelyshev and S. Timoshenkov p. 1159  abstract

SOLID STATE MICRO BATTERIES

Solid-State Electrochemistry in Microelectronics

A. Skundin, T. Kulova, and A. Rudy p. 1167  abstract

Crystal Structure and Phase Composition of the Electrode Composite Material Si@O@Al

A. S. Rudy, E. A. Kozlov, S. V. Kurbatov, and N. Yu. Yurchenko p. 1175  abstract

In Situ Study of Lithium Electroplating in Anode-Free Solid-State Batteries by RBS Method

S. V. Kurbatov, N. S. Melesov, E. O. Parshin, A. S. Rudy, and V. V. Naumov p. 1184  abstract

CHARACTERIZATION AND METROLOGY

Modification of Constant Voltage Stress Method for Characterizing Time-Dependent Dielectric Breakdown of Thin Gate Dielectrics of MOS Devices

D. V. Andreev, S. A. Kornev, V. M. Maslovsky, and V. V. Andreev p. 1190  abstract

Estimation of Thin Film Thickness Using the Williamson–Hall Decomposition

P. B. Mozhaev p. 1196  abstract

Express Analysis for Heterostructures Quality

V. O. Atyunin, V. V. Borichok, E. I. Kobzev, O. I. Rabinovich, A. A. Savchuk, M. N. Orlova, U. V. Osipov, and I. V. Borzykh p. 1207  abstract

Luminescence and Raman Spectroscopy of Polycrystalline Diamond Films with Nitrogen-Vacancy Centers for Converters of Vacuum Ultraviolet Radiation

A. N. Demidova, E. A. Il’ichev, D. A. Korlyakov, G. N. Petruhin, A. V. Romashkin, G. S. Rychkov, and N. V. Finogeev p. 1213  abstract

DEVICE MATERIALS

Atomistic Investigation of the Ferroelectric and Dielectric Properties of AlN-Based Films

E. B. Kalika, I. G. Margolin, I. A. Savichev, and A. A. Chouprik p. 1219  abstract

Oxide Antiferromagnetics as Barrier Materials for Josephson Junctions Based on Cuprate Superconductor

K. Y. Constantinian, Yu. V. Kislinskii, G. A. Ovsyannikov, A. M. Petrzhik, I. E. Moskal, and A. V. Shadrin p. 1224  abstract

Features of Electrochemical Synthesis, Structure, and Magnetometry of Iron, Cobalt, and Nickel Nanowires in a Porous Anodic Aluminum Oxide Matrix

E. A. Grushevsky, N. G. Savinski, O. S. Trushin, and L. A. Shendrikova p. 1232  abstract

Modeling of Structural, Electronic, and Magnetic Properties of 2D TlGaS2 Doped with a Magnetic Impurity

M. M. Asadov, S. N. Mustafaeva, S. S. Huseynova, and V. F. Lukichev p. 1242  abstract

LITHOGRAPHY AND RELATED PROCESSES

Optimization of Electrostatic-Assisted Ultrasonic Spray Coating of Photoresist Film

V. A. Petukhov, K. A. Tsarik, and A. V. Lashkov p. 1249  abstract

Study of the Influence of Mo–Si Structural Parameters on the Optical Properties of Masking Coatings for Photomasks

N. V. Krokhan, R. A. Sharipov, A. I. Novoseltsev, O. V. Novikova, V. I. Shevyakov, and A. V. Anikin p. 1254  abstract

Investigation of the Influence of the Design of Alignment Marks and the Used Diffraction Order on the Amount of Overlay in Submicron Photolithography in the Formation of Thick-Film Aluminum Wiring of Silicon Semiconductor Structures

Yu. A. Chaplygin, D. Yu. Shelkunov, and V. I. Shevyakov p. 1260  abstract

Analysis of the Causes of the LER Effect and Methods for Reducing Its Magnitude

M. S. Kulpinov, M. G. Putrya, A. A. Golishnikov, V. V. Losev, and A. G. Balashov p. 1266  abstract

Comprehensive Modeling of Line Edge Roughness and Line Width Roughness in Semiconductor Nanofabrication

M. S. Kulpinov, V. V. Losev, A. Y. Krasyukov, V. V. Loseva, and A. D. Kalyonov p. 1272  abstract

Investigation of the Tin-Oxo Cluster TOC-21 as a Resist for Electron Beam Lithography

K. G. Nikitin, K. Tsarik, M. Zakharina, and K. Arsenyeva p. 1280  abstract

Formation of Nanoscale Radiation Fluxes for X-ray Scanning Lithography

V. K. Egorov and E. V. Egorov p. 1283  abstract

Application of Colloidal Lithography to Create Nanostructures

V. P. Kudrya p. 1292  abstract

PLASMA AND VACUUM MICROTECHNOLOGIES

Physical Principles of in situ Sidewall Profile Control in Cryogenic Plasma Etching of HAR Silicon Microstructures

K. Rudenko, A. Miakonkikh, V. Kuzmenko, K. Fetisenkova, and A. Melnikov p. 1297  abstract

Comparative Characteristics of Microelectronic Deep Etching Technologies for X-ray Optics Applications

M. N. Sorokovikov, D. A. Zverev, I. I. Lyatun, A. A. Barannikov, M. A. Voevodina, V. A. Yunkin, A. V. Miakonkikh, K. V. Rudenko, and A. A. Snigirev p. 1306  abstract

Fabrication of Structures on SiC Surfaces by Plasma Chemical Etching

V. S. Klimin, P. A. Tarasov, M. N. Grigoryev, P. E. Gavrish, A. A. Tkacheva, V. V. Ptashnik, and O. A. Ageev p. 1316  abstract

Reproducibility and Quality of Magnetron Deposition Processes for MoS2 Thin Films

M. A. Sharapkov, A. I. Belikov, and N. M. Sinyavin p. 1320  abstract

Some Properties of Argon As an Actinometric Atom. III. Parameters of the Reduced Global Model

V. P. Kudrya p. 1325  abstract

Utilizing Porous Low-k Dielectrics for Self-Monitoring of Vacuum Chamber Contamination

Mungunsuvd Gerelt-Od, F. Y. Konyakhin, A. S. Vishnevskiy, D. V. Lopaev, K. A. Vorotilov, T. V. Rakhimova, and M. R. Baklanov p. 1329  abstract

Growth of AlGaN/GaN Heterostructures Using Metal-Rich/N-Rich Growth Modes on Silicon Substrates by the Ammonia MBE

D. Tuzhilin, V. Nepomilueva, and K. Tsarik p. 1339  abstract

Certain Features of Thermal Deposition of Golden Films onto Mesoporous Silicon

K.B. Kim, S. S. Chernenko, S. I. Niftaliev, M. V. Grechkina, A. I. Chukavin, A. N. Lukin, and A. S. Len’shin p. 1345  abstract

Surface Thermomigration of Eutectic Droplets and Molecular Clusters

E. Yu. Buchin p. 1352  abstract

Features of Dissipative Processes during Annealing of Silicon Structures with Buried Silicate Layers

Yu. I. Denisenko p. 1360  abstract

Temperature Dependence of the Nanostructure Morphology during Sputtering of Silicon by Nitrogen Ions

V. K. Smirnov, D. S. Kibalov, and A. B. Churilov p. 1368  abstract

QUANTUM INFORMATICS

International Year of Quantum Physics and Quantum Technologies: History and Prospects

N. A. Bogdanova, Yu. I. Bogdanov, and V. F. Lukichev p. 1376  abstract

Some Optimization Methods for Quantum Systems: Gradient Projection Method on Stiefel Manifolds and Beyond

A. N. Pechen p. 1384  abstract

Performance of Qutrit QAOA Algorithm with Fixed Parameters under Noise

A. Yu. Chernyavskiy, B. I. Bantysh, and Yu. I. Bogdanov p. 1391  abstract

Investigation of Optical Quantum States Using Probability Amplitude Generating Functions

Yu. I. Bogdanov, N. A. Bogdanova, and V. F. Lukichev p. 1396  abstract

Higher-Order Traps in Quantum Control Landscapes of Physical Systems

B. O. Volkov, A. Myachkova, I. M. Korolev, and A. N. Pechen p. 1402  abstract

Simulation of Solid-State Structures with a Single Electron

I. Semenikhin, D. Svintsov, L. Fedichkin, and V. Vyurkov p. 1407  abstract

Kraus Maps and Complex Stiefel Manifolds

I. T. Russkikh, B. O. Volkov, and A. N. Pechen p. 1412  abstract

Polarization States Rotation in Satellite-to-Earth Quantum and Classical Optical Communications

A. V. Khmelev, K. A. Barbyshev, A. V. Duplinsky, L. V. Pismeniuk, A. N. Chernov, E. I. Ivchenko, and V. L. Kurochkin p. 1417  abstract

Automatic Optical Power Control for Satellite Communication System in Low-Photon Mode

D. Sevryukov, A. Khmelev, V. Merzlinkin, V. Kurochkin, and R. Ozhegov p. 1422  abstract

Connectivity-Aware Qubit Mapping and CNOT Cost Minimization for Quantum Hashing Circuits

I. G. Zinnatullin, K. R. Khadiev, and I. A. Nikitin p. 1429  abstract

Evaluation of the Effectiveness of the Toeplitz Hashing Algorithm in Processing Noise Signals with a Limited Frequency Range

A. I. Kamalov, M. E. Sibgatullin, L. R. Gilyazov, and N. M. Arslanov p. 1436  abstract

Quantum Random Forest Model Prediction Circuit Gate Complexity

K. R. Khadiev, L. I. Safina, and I. G. Zinnatullin p. 1442  abstract

Shallow Circuit Implementation for the Phase Form of Quantum Hashing and Local-Sensitive Hashing on IBMQ Noisy Emulators

K. R. Khadiev, D. Melnikov, K. R. Altynbaev, and A. I. Khadieva p. 1449  abstract

Investigation of the Effect of the Randomness Criterion on the Success of Passing NIST Tests by a Quantum Random Number Generator

D. Mavkov, M. Sibgatullin, L. Gilyazov, and N. Arslanov p. 1458  abstract

A Quantum-Search-Based Algorithm for the 0-1 Knapsack Problem

K. A. Stepanenko p. 1463  abstract

Development of Methods to Control the Hardware Components of Quantum Computers Taking into Account Decoherence and Quantum Noise

I. K. Golyshev, I. A. Dmitriev, K. B. Koksharov, N. A. Bogdanova, and Yu. I. Bogdanov p. 1469  abstract

Tomography of Optical Quantum States with Imperfect Photon-Number-Resolving Detectors

I. A. Dmitriev, I. K. Golyshev, N. A. Bogdanova, Yu. I. Bogdanov, and V. F. Lukichev p. 1475  abstract

Precision Reconstruction of Qudits Accounting for Readout Errors via the Confusion Matrix

K. B. Koksharov, N. A. Bogdanova, Yu. I. Bogdanov, and V. F. Lukichev p. 1479  abstract

Analysis of Quantum Computing Resources in the Implementation of the Quantum Fourier Transform and Grover Algorithm on Qudit Systems

A. S. Chudakov, N. A. Borschevskaia, D. V. Fastovets, A. Yu. Chernyavskiy, B. I. Bantysh, and Yu. I. Bogdanov p. 1483  abstract

Quantum Entanglement in Two-Spin Systems in Multiple Pulse NMR Spin Locking with Dephasing Relaxation

G. A. Bochkin, A. I. Zenchuk, E. I. Kuznetsova, A. V. Fedorova, and E. B. Fel’dman p. 1490  abstract

Quantum Coherence Restoring in Communication Line via Strong Pulse-Form Interaction with Environment

E. B. Fel’dman, I. D. Lazarev, A. N. Pechen, and A. I. Zenchuk p. 1497  abstract

High-Fidelity Distribution of Macroscopic Entanglement over Network of BEC Qubits

A. N. Pyrkov and I. D. Lazarev p. 1505  abstract

Decoherence Measure of Single-Qubit Ion Gate

L. Fedichkin and A. Kuznetsova p. 1512  abstract

Evaluation of the Efficiency of Quantum Information Processors

L. Fedichkin and D. Tarpanov p. 1517  abstract

Stationary Current and Shot-Noise Power Spectrum for Quantum Transport through a Double Quantum Dot System

L. E. Fedichkin and T. B. Fakhrutdinov p. 1522  abstract

State Control and Measurement System for Semiconductor Quantum Dots Qubits

P. O. Mikhailov, M. A. Surkov, V. V. Shorokhov, and A. S. Trifonov p. 1527  abstract

Application a Quantum Machine Learning Algorithm to the Applied Problem of Modeling the Thermal Regime of Servers

P. V. Buzin and M. A. Remnev p. 1539  abstract

Solving the Traveling Salesman Problem Using Quantum Devices: QUBO and HOBO Formulations

G. V. Shuvalov, E. N. Krivtsova, M. A. Remnev, and A. V. Kapranov p. 1553  abstract

Predicting Quantum Capacitance of a SOI Nanowire Induced Quantum Dot: On-Chip Quantum Chemistry Approach

I. D. Kopchinskii, V. V. Shorokhov, A. A. Popov, and N. A. Shagalov p. 1563  abstract

Analysis of the Generalized Dirac Equation

V. O. Turin, D. D. Kireev, I. V. Nazritsky, P. A. Andreev, A. N. Skripchenko, E. I. Burtsev, A. V. Turina, I. V. Shcheglov, and Y. V. Ilyushina p. 1570  abstract