Contents
Russian Microelectronics

Vol. 25, No. 6, 1996

Simultaneous English language translation of the journal is available from maik nauka / Interperiodica Publishing (Russia).
Distributed worldwide by Plenum / Consultants Bureau. Russian Microelectronics ISSN 1063-7397.

Fabrication of High-Quality Dielectric Layers at Low Temperatures: A Review

M. R. Baklanov and L. L. Vasil’eva p. 355  abstract

Measurements of Submicron Pattern Features on Solid Surfaces with a Scanning Electron Microscope:
1. Instruments and Methods (A Review)

Yu. A. Novikov and A. V. Rakov p. 368  abstract

Measurements of Submicron Pattern Features on Solid Surfaces with a Scanning Electron Microscope:
2. New Concept of Scanning Electron Microscope–based Metrology (A Review)

Yu. A. Novikov and A. V. Rakov p. 375  abstract

Gettering in Silicon Transistor Structures

G. K. Zholudev and S. L. Khripko p. 384  abstract

Formation of Space Charge in Alumina Films

V. V. Micho and L. N. Semenyuk p. 389  abstract

Chip Protection against Water Corrosion, Leakage Currents, and Alpha-Radiation

A. G. Salina p. 392  abstract

Mask Protection in Photolithography

A. G. Salina and B. P. Sharaev p. 395  abstract

Simulation of Deposition of Borophosphosilicate Glass Obtained by Hydride Oxidation
at Atmospheric Pressure

A. S. Turtsevich, O. Yu. Nalivaiko, D. A. Zaitsev, V. I. Gran’ko, and I. I. Makarevich p. 398  abstract

Optically Induced Switching in Bistable Heavily Doped
n+-Polysilicon–Tunnel-Transparent Oxide–n-Silicon Structures

V. Yu. Osipov p. 404  abstract

Heteroepitaxial Silicon Structures on Fianit Substrates

V. G. Shengurov, V. N. Shabanov, A. N. Buzynin, Yu. N. Buzynin,
V. V. Osiko, and E. E. Lomonova p. 409  abstract

Domain Structure of Epitaxial Garnet–Ferrite Films in a Magnetic Field
of Two-Dimensional Periodicity

V. V. Volik, I. I. Davidenko, V. F. Kovalenko, and S. N. Lyakhimets† p. 412  abstract

Two-Layer Thin-Film Magnetoresistive Read Heads

N. N. Averin, S. I. Kasatkin, A. M. Murav’ev, and A. N. Noskov p. 416  abstract

VHDL-based CAD of Embedded Systems

E. A. Zavadskaya, L. B. Livshits, and N. N. Sharipova p. 420  abstract

Obituary

Vasilii N. Sretenskii p. 423

Author Index to Volume 25, 1996 p. 424

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