Contents
Russian Microelectronics
Vol. 32, No. 4, 2003
Simultaneous English language translation of the journal is available from MAIK Nauka / Interperiodica (Russia).
Distributed worldwide by Kluwer Academic / Plenum Publishers. Russian Microelectronics ISSN 1063-7397.
In Memoriam: Dr. Petr A. Arutyunov p. 189
Thin Films: Physics and Technology
Thermally Induced Viscous Flow of Borophosphosilicate-Glass
Thin Films on Stepped Surfaces, Part 2: Generalized Parameters for
ULSI Glass Flow Characterization
V. Y. Vasilev p. 190 abstract
Thermal Oxidation of GaAs and InP in the Presence of Al2(SO4)3
S. S. Lavrushina, I. Ya. Mittova, O. V. Artamonova, and G. O. Vladimirov p. 200 abstract
Phenomenological Model of the Piezoresistive Effect in Polysilicon Films
V. A. Gridchin and V. M. Lubimsky p. 205 abstract
Process Monitoring
Phase Detection Used in the Optical-Emission Monitoring
of SiO2/Si Plasma Etching
K. V. Rudenko, Ya. N. Sukhanov, and N. I. Bazaev p. 214 abstract
Structural Characterization
XRD Study of Quantum-Well Heterostructures
A. M. Afanasev, R. M. Imamov, E. M. Pashaev, S. A. Tikhomirov,
M. A. Chuev, and S. N. Yakunin p. 219 abstract
Nanostructures
Computer Simulation of a Nanoscale Ballistic SOI MOSFET
with a Sub-10-nm Si Layer
V. V. Vyurkov, A. A. Orlikovsky, and A. A. Sidorov p. 224 abstract
Devices and Circuits
Nonlinear Response of a Rectangular
Membrane Sensing Element
V. A. Gridchin, V. M. Lubimsky, and A. V. Shaporin p. 233 abstract
Switch-Level Test-Vector Generation
for CMOS Combinational Logic
A. E. Lyulkin p. 243 abstract
Materials
Lead-Free Solders in IC Manufacture: A Review
V. V. Zenin, V. N. Belyaev, Yu. E. Segal, and A. A. Kolbenkov p. 247 abstract
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