Contents
Russian Microelectronics

Vol. 31, No. 4, 2002

Simultaneous English language translation of the journal is available from MAIK “Nauka / Interperiodica” (Russia).
Distributed worldwide by Kluwer Academic / Plenum Publishers. Russian Microelectronics ISSN 1063-7397.

Metrology

Linear Standard for SEM–AFM Microelectronics Dimensional Metrology in the Range 0.01–100 m

Ch. P. Volk, E. S. Gornev, Yu. A. Novikov, Yu. V. Ozerin, Yu. I. Plotnikov,
A. M. Prokhorov^†, and A. V. Rakov p. 207  abstract

Process Technologies

ULSI Gap Filling with a Thin CVD SiO₂-Based Insulator: A Review

V. Y. Vassiliev p. 224  abstract

DeleCut: Producing High-Quality SOI Structures by Hydrogen Ion Implantation

V. P. Popov, I. V. Antonova, A. A. Frantsuzov, L. N. Safronov, A. I. Popov, O. V. Naumova,
A. Kh. Antonenko, D. V. Kilanov, and I. V. Mironova p. 232  abstract

Photoresists Used as Mask Materials in Ion Implantation for the CMOS Technology:
Optimizing Mask Thickness

S. V. Gran’ko, F. F. Komarov, and A. V. Leont’ev p. 238  abstract

Diagnostics

Open Microwave Resonator Used for the Characterization of a Helicon-Source Plasma

Yu. P. Baryshev, I. N. Moskalev, I. P. Koritkin, A. A. Orlikovsky, and A. O. Prokof’ev p. 243  abstract

Device Physics

Lateral Injection Utilized for Improving the Performance of Microwave Bipolar Transistors

Yu. P. Snitovskii p. 248  abstract

Carrier Trapping and Scattering in Ge-Doped SiO₂

D. I. Brinkevich, V. S. Prosolovich, and Yu. N. Yankovskii p. 254  abstract

Polarity-Dependent Electrical Mass Transfer in Silicon: The Location
and Shape of the Metal-like Bridge

B. A. Panfilov p. 257  abstract

Materials

Structural and Behavioral Irreproducibility of Solid Materials: A New Insight into the Problem

N. V. Bodyagin, S. P. Vikhrov, S. M. Mursalov, and I. V. Tarasov p. 260  abstract

Effect of Gamma Irradiation on the Surface Morphology of SOS Films

A. N. Kiselev, G. A. Maksimov, V. A. Perevoshchikov, V. D. Skupov, and D. O. Filatov p. 265  abstract

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