Contents
Russian Microelectronics
Vol. 31, No. 4, 2002
Simultaneous English language translation of the journal is available from MAIK Nauka / Interperiodica (Russia).
Distributed worldwide by Kluwer Academic / Plenum Publishers. Russian Microelectronics ISSN 1063-7397.
Metrology
Linear Standard for SEMAFM Microelectronics Dimensional Metrology in the Range 0.01100 m
Ch. P. Volk, E. S. Gornev, Yu. A. Novikov, Yu. V. Ozerin, Yu. I. Plotnikov,
A. M. Prokhorov, and A. V. Rakov p. 207 abstract
Process Technologies
ULSI Gap Filling with a Thin CVD SiO2-Based Insulator: A Review
V. Y. Vassiliev p. 224 abstract
DeleCut: Producing High-Quality SOI Structures by Hydrogen Ion Implantation
V. P. Popov, I. V. Antonova, A. A. Frantsuzov, L. N. Safronov, A. I. Popov, O. V. Naumova,
A. Kh. Antonenko, D. V. Kilanov, and I. V. Mironova p. 232 abstract
Photoresists Used as Mask Materials in Ion Implantation for the CMOS Technology:
Optimizing Mask Thickness
S. V. Granko, F. F. Komarov, and A. V. Leontev p. 238 abstract
Diagnostics
Open Microwave Resonator Used for the Characterization of a Helicon-Source Plasma
Yu. P. Baryshev, I. N. Moskalev, I. P. Koritkin, A. A. Orlikovsky, and A. O. Prokofev p. 243 abstract
Device Physics
Lateral Injection Utilized for Improving the Performance of Microwave Bipolar Transistors
Yu. P. Snitovskii p. 248 abstract
Carrier Trapping and Scattering in Ge-Doped SiO2
D. I. Brinkevich, V. S. Prosolovich, and Yu. N. Yankovskii p. 254 abstract
Polarity-Dependent Electrical Mass Transfer in Silicon: The Location
and Shape of the Metal-like Bridge
B. A. Panfilov p. 257 abstract
Materials
Structural and Behavioral Irreproducibility of Solid Materials: A New Insight into the Problem
N. V. Bodyagin, S. P. Vikhrov, S. M. Mursalov, and I. V. Tarasov p. 260 abstract
Effect of Gamma Irradiation on the Surface Morphology of SOS Films
A. N. Kiselev, G. A. Maksimov, V. A. Perevoshchikov, V. D. Skupov, and D. O. Filatov p. 265 abstract
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