Contents
Russian Microelectronics
Vol. 34, No. 3, 2005
Simultaneous English language translation of the journal is available from MAIK Nauka / Interperiodica (Russia).
Distributed worldwide by Springer. Russian Microelectronics ISSN 1063-7397.
Process Technologies
Residual-Photoresist Removal from Si and GaAs Surfaces
by Atomic-Hydrogen Flow Treatment
E. V. Anishchenko, V. A. Kagadei, E. V. Nefedtsev, K. V. Oskomov,
D. I. Proskurovski, and S. V. Romanenko p. 131 abstract
Thin Films
Electrical Behavior of In Situ Doped Polysilicon Films
as Influenced by the Dopants
A. A. Kovalevskii, V. E. Borisenko, V. M. Borisevich, and A. V. Dolbik p. 140 abstract
Making Anodic Alumina Thin Films Having a Pore Array
A. I. Vorobyova and E. A. Outkina p. 147 abstract
Micro- and Nanoelectronic Devices
Adjusting the Spectral Response of Silicon Photodiodes
by Additional Dopant Implantation
I. V. Vanyushin, V. A. Gergel, V. A. Zimoglyad, and Yu. I. Tishin p. 155 abstract
Response Mechanism of the Base-in-Well Bipolar Magnetotransistor
R. D. Tikhonov p. 160 abstract
Microelectromechanical Systems
Square-Membrane Deflection and Stress: Identifying the Validity Range
of a Calculation Procedure
V. A. Gridchin, V. V. Grichenko, and V. M. Lubimsky p. 173 abstract
Silicon-Defect Spectroscopy
Positron-Annihilation-Spectroscopy Study of Proton-Induced Defects in Silicon
V. I. Grafutin, O. V. Ilyukhina, G. G. Myasishcheva, V. V. Kalugin,
E. P. Prokopiev, S. P. Timoshenkov, N. O. Khmelevskii, and Yu. V. Funtikov p. 181 abstract
Circuit Analysis and Synthesis
Transient Analysis of Subnanosecond Integrated ADCs
A. Marcinkevicius, D. Poviliauskas, and V. Jasonis p. 187 abstract
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