Contents
Russian Microelectronics

Vol. 33, No. 3, 2004

Simultaneous English language translation of the journal is available from MAIK “Nauka / Interperiodica” (Russia).
Distributed worldwide by Kluwer Academic / Plenum Publishers. Russian Microelectronics ISSN 1063-7397.

Lithography

Optimizing Light-Source Aperture for Off-Axis Illumination
in Optical Nanolithography: Theoretical Consideration

V. V. Ivin, T. M. Makhviladze, and K. A. Valiev p. 127  abstract

Epitaxy

Pore Sealing on Si(001) and Si(111) in Homoepitaxy
and Annealing: A Monte Carlo Simulation

A. V. Zverev, I. G. Neizvestny, A. V. Chemakin, N. L. Shwartz, and Z. Sh. Yanovitskaya p. 137  abstract

Solid-Phase Synthesis

Phase Formation in Ti–Co–N/CoSi_x/Si(100) and Ti–Co–Si–N/CoSi_x/Si(100)
Systems by Diffusion Reactions: The Role of Nitrogen

A. G. Vasiliev, A. L. Vasiliev, R. A. Zakharov,
A. A. Orlikovsky, I. A. Horin, and M. Eindou p. 147  abstract

Microstructure Science

Majority-Carrier Lifetime in the Potential Barrier
of an MIS Capacitor under Monopolar Conditions

N. A. Penin p. 152  abstract

Effect of Surface Roughness on Quantum
Carrier Transport in Ultrathin Films

S. D. Ananiev, V. V. V’yurkov, and A. A. Orlikovsky p. 159  abstract

Thin Films

ZnO Thin Films with Hole Conduction Produced by N⁺ Ion
Implantation and Oxygen-Radical Annealing

A. N. Georgobiani, A. N. Gruzintsev, V. T. Volkov, M. O. Vorob’ev, and V. A. Dravin p. 165  abstract

Dry Etching

Anisotropic Etching of SiO₂ in High-Voltage Gas-Discharge Plasmas

N. L. Kazanskii, V. A. Kolpakov, and A. I. Kolpakov p. 169  abstract

Radiation-Hardening Methods

Circuit-Design Techniques of Radiation Hardening for Monolithic Op Amps

T. M. Agakhanyan p. 183  abstract

Circuit Analysis and Synthesis

Power Consumption of Asymptotically Adiabatic Static Logic Gates

V. V. Losev and V. I. Starosel’skii p. 188  abstract

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