Contents

Russian Microelectronics


Vol. 52, No. 3, 2023


Surface Morphology and Photoluminescence Spectra of Pseudomorphic {InGaAs/GaAs} Superlattices on GaAs (100), (110), and (111)A Substrates

E. A. Klimov, S. S. Pushkarev, A. N. Klochkov and M. O. Mozhaeva p. 129  abstract

Precise Tomography of Qudits

Yu. I. Bogdanov, N. A. Bogdanova, Yu. A. Kuznetsov, K. B. Koksharov and V. F. Lukichev p. 135  abstract

Recording the Polarization State of a Photon in the Correlated Electronic States of an Array of Quantum Dots

A. V. Tsukanov and I. Yu. Kateev p. 144  abstract

Design of a Nonlinear Model of a Pseudomorphic 0.15 μm рHEMT AlGaAs/InGaAs/GaAs Transistor

D. Tsunvaza, R. V. Ryzhuk, I. S. Vasil’evskii, N. I. Kargin and V. A. Klokov p. 160  abstract

Simulation of the Adsorption and Diffusion of Lithium Atoms on Defective Graphene for a Li-Ion Battery

M. M. Asadov, S. O. Mammadova, S. S. Huseynova, S. N. Mustafaeva and V. F. Lukichev p. 167  abstract

Fast Electrochemical Micropump for Portable Drug Delivery Module

I. V. Uvarov, P. S. Shlepakov, A. M. Abramychev and V. B. Svetovoy p. 186  abstract

Hydrogen Plasma under Conditions of Electron-Cyclotron Resonance in Microelectronics Technology

E. A. Polushkin, S. V. Nefed’ev, A. V. Koval’chuk, O. A. Soltanovich and S. Yu. Shapoval p. 195  abstract

Simulation of a System of Nanoantennas Located in a TSV Channel as a System for Receiving and Transmitting Data

D. A. Serov and I. A. Khorin p. 198  abstract

Diamond-Based Detectors of Ionizing Radiation

A. A. Altukhov p. 205  abstract

Achievement of Critical and Limiting Parameters in Microdevices on Surface Acoustic Waves

A. S. Koigerov p. 213  abstract