Vol. 48, No. 2, 2019

Russian Microelectronics

Influence of Pulsed Laser Deposition Modes on Properties of Nanocrystalline LiNbO₃ Films

Z. E. Vakulov, Yu. N. Varzarev, E. Yu. Gusev, A. V. Skrylev, A. E. Panich, A. V. Miakonkikh, I. E. Klemente, K. V. Rudenko, B. G. Konoplev and O. A. Ageev p. 59 abstract

Nanoscaled Profiling of Silicon Surface via Local Anodic Oxidation

V. V. Polyakova, I. N. Kots, V. A. Smirnov and O. A. Ageev p. 66 abstract

Studying the Regimes of Silicon Surface Profiling by Focused Ion Beams

I. N. Kots, A. S. Kolomiitsev, S. A. Lisitsyn, V. V. Polyakova, V. S. Klimin and O. A. Ageev p. 72 abstract

Formation of Dielectric Nanolayers of Aluminum and Silicon Oxides on A^IIIB^V Semiconductors

Yu. K. Ezhovskii p. 80 abstract

Effect of the Fermi Surface Anisotropy on the Electrical Conductivity of a Thin Inhomogeneous Metal Wire

I. A. Kuznetsova, D. N. Romanov and A. A. Yushkanov p. 85 abstract

Features of the Kinetics of Bulk and Heterogeneous Processes in CHF₃ + Ar and C₄F₈ + Ar Plasma Mixtures

D. B. Murin, A. M. Efremov and K.-H. Kwon p. 99 abstract

Studying the Thermodynamic Properties of Composite Magnetic Material Based on Anodic Alumina

A. I. Vorobjova, D. L. Shimanovich, O. A. Sycheva, T. I. Ezovitova, D. I. Tishkevich and A. V. Trykhanov p. 107 abstract

Fabrication and Electrical Characteristics of Asymmetric Rings Made of HTS YBCO Films Obtained by Pulsed Laser Deposition

A. I. Il’in, A. A. Ivanov, O. V. Trofimov, A. A. Firsov, A. V. Nikulov and A. V. Zotov p. 119 abstract

Effect of the Built-in Surface Potential on the I–V Characteristics of Silicon MIS Structures

R. K. Yafarov p. 127 abstract

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Russian Microelectronics