Contents
Russian Microelectronics

Vol. 36, No. 1, 2007

Simultaneous English language translation of the journal is available from Pleiades Publishing, Ltd.
Distributed worldwide by Springer. Russian Microelectronics ISSN 1063-7397.

Nanoelectronics

Waveguide Nanoelectronics

A. A. Gorbatsevich and V. V. Kapaev p. 1  abstract

Plasma Diagnostics

New Method for the Langmuir Probe Diagnostics of Polymerizing Plasmas

K. V. Rudenko, A. V. Myakon’kikh, A. A. Orlikovsky, and A. N. Pustovit p. 14  abstract

Process Technologies

Nitrogen Concentration in ZnO Films Grown by Magnetron
Sputtering in an Ar–NO Plasma

O. V. Kononenko, Y. S. Noh, T. W. Kim, and W. K. Choi p. 27  abstract

Dopant Diffusion Dynamics and Optimal Diffusion Time
as Influenced by Diffusion-Coefficient Nonuniformity

E. L. Pankratov p. 33  abstract

Enhancing the Dry-Etch Durability of Photoresist Masks:
A Review of the Main Approaches

S. V. Zelentsov, N. V. Zelentsova, A. N. Kolesov,
L. A. Bogatyreva, and I. A. Mashtakov p. 40  abstract

Void Transformation and Dopant Distribution in Porous Silicon

A. A. Kovalevskii, A. V. Dolbik, D. N. Unuchek, and M. V. Tarasikov p. 49  abstract

Radiation-Enhanced Thermal Oxidation of Silicon

A. B. Simakov and A. Yu. Bashin p. 53  abstract

Circuit Analysis and Synthesis

Linear and Nonlinear Modeling of Switched-Capacitor Modulators

A. S. Korotkov and M. V. Telenkov p. 56  abstract

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