Contents
Russian Microelectronics
Vol. 30, No. 1, 2001
Simultaneous English language translation of the journal is available from MAIK “Nauka / Interperiodica” (Russia).
Distributed worldwide by Kluwer Academic / Plenum Publishers. Russian Microelectronics ISSN 1063-7397.
Etching of Gallium Arsenide in a Cl2 + H2 Plasma
A. M. Efremov and A. V. Antonov p. 1 abstract
Oscillations in Ballistic FETs
S. V. Obolenskii and M. A. Kitaev p. 7 abstract
Enhanced Generation of Interface States in MIS IC Elements under the Action of UV
and X-ray Radiations
M. N. Levin, E. N. Bormontov, O.V. Volkov, S. S. Ostroukhov, and A. V. Tatarintsev p. 12 abstract
The Effect of Ballistic Conduction Electrons on the Current–Voltage Characteristics
of Thin-Film Bismuth-Based Cross-Shaped Microstructures
A. I. Il’in, L. I. Aparshina, S. V. Dubonos, and B. N. Tolkunov p. 17 abstract
The Formation of Silicon Dioxide Films by TEOS Photochemical Decomposition
A. M. Svetlichnyi, V. V. Polyakov, and Yu. N. Varzarev p. 22 abstract
Microsystems Engineering: A Great Stride Forward in Microelectronics Technology
P. P. Mal’tsev p. 27 abstract
Acoustic Microscopy in Micrometrology
V. S. Kuznetsov, S. A. Ogorodnikov, M. N. Preobrazhenskii, and A. V. Prokaznikov p. 29 abstract
The Structure of Complex Thin-Film Systems from Ellipsometric Simulation:
A PbI2–Cu Photoresist
N. V. Sopinskii p. 35 abstract
Anomalous Dependence of Small-Angle IR Scattering on Photoexcitation Power
and Surface-Layer Defects in Mechanically Polished Silicon and Germanium Single Crystals
V. A. Yur’ev p. 40 abstract
Low-Voltage Complementary Push-Pull Inverters for ULSI: Simulation and Prospects
A. N. Bubennikov and A.V. Zykov p. 43 abstract
A Circuit-Design Model of a Digital Neuron Operating with the Mean Value of a Stochastic Stream
A. V. Luk’yanov p. 54 abstract
A High-Speed Pseudorandom Test Pattern Generator
I. A. Murashko and V. N. Yarmolik p. 59 abstract
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