Influence of the Phase and Elemental Compositions
and Defect Structure on the Physicomechanical Properties
and Tribotechnical Characteristics
of Nanostructural TiHfSiN Coatings

A. D. Pogrebnjak^a*, M. V. Kaverin^a, and V. M. Beresnev^b

^a Sumy State University, ul. Rimskogo-Korsakova 2, Sumy, 40002 Ukraine
^b Kharkiv National University, pr. Svobody 4, Kharkiv, 61022 Ukraine
*e-mail: alexp@i.ua

Received October 23, 2012; in final form, April 16, 2013

Abstract—A new approach to preparing superhard nanostructural Ti–Hf–Si–N coatings with high physicome-
chanical performance is developed and tested. Samples with Ti–Hf–Si–N nanocoatings obtained under different
deposition conditions were investigated using nuclear physical analysis methods, namely, Rutherford backscat-
tering, energy-dispersive X-ray analysis, secondary-ion mass spectrometry, and the slow positron beam
method, as well as by conducting X-ray diffraction analysis and microhardness measurements and testing the
tribotechnical performance of the films. It is found that the grain size varies from 3.9 to 10.0 nm depending on the
bias applied to the substrate and the residual pressure in the chamber during nanocoating deposition. It is shown
that the microhardness varies considerably (from 37.4 to 48.6 1.2 GPa) according to the percentage and num-
ber of phases, grain size, and material transfer along nanograin boundaries and interfaces. In tribological tests
of the Ti–Hf–Si–N nanocoatings, the mechanism of cohesive and adhesive fracture changes and the friction
coefficient may vary from 0.46 to 0.15.

10.1134/S1063784214010149

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