Quality Diagnostics of Concave Spherical Surfaces
by a Grazing X-Ray Beam

I. V. Yakimchuka*, A. V. Buzmakova, A. V. Andreevb, and V. E. Asadchikova

a Shubnikov Institute of Crystallography, Russian Academy of Sciences, Leninskii pr. 59, Moscow, 119333 Russia
b Moscow State University, Moscow, 119991 Russia
*e-mail: yaivan@list.ru

Received April 10, 2013

Abstract—An approach to quality diagnostics of concave spherical surfaces by a grazing X-ray beam is con-
sidered. Errors of the approach in locating defects and finding their sizes are estimated. The algebraic method
of experimental data reconstruction is considerably modified to obtain a surface distribution of defects attenu-
ating the grazing beam. Used reconstruction algorithms are compared.

10.1134/S1063784214010216


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