Composite Electrodes for Current Sources Based on Graphene-Like Films in Porous Silicon

Abstract—In this work, the results of formation of composite membranes with a thickness of about 200 μm with a high electric conduction based on porous silicon and graphene-like films have been presented. A method of CVD film synthesis that makes it possible to form a graphene-like coating on the inner surface of gradient-porous silicon with variable pore morphology across the thickness has been proposed. The pore sizes vary gradually from units of nanometers on the upper surface to several micrometers deep in silicon.