A. N. Tyumentsev, Yu. P., Pinzhin, A. D. Korotaev, A. F. Safarov,
S. P. Bugaev, A. G. Nikolaev, and G. Yu. Yushkov
Kuznetsov Physicotechnical Institute, Tomsk State University, pl. Revolutsii 1, Tomsk, 634050 Russia
Received June 21, 1995; in final form, July 28, 1995
Abstract—Electron microscopy was used to study microstructural changes in the near-surface layers of molyb-
denum subjected to a high-dose implantation with Zr+ + N+ ions with various combinations of ion-beam treat-
ment parameters. Interaction of molybdenum with the elements of the implanter vapor phase (C, N) is found to
be an important factor determining structural and phase modification in the ion-implanted layer. Mechanisms
of this modification are shown to be a function of the parameters of the ion-beam treatment (the composition
of the implanter gaseous phase, ion energy, average ion-current density, and target temperature). The role of
these parameters in the phase and structural modification of the molybdenum ion-implanted layer is analyzed.
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