Peculiarities of the Formation of Dy/Co Periodic Multilayer Systems upon Magnetron Sputtering

G. V. Prutskov^a, I. A. Subbotin^a, E. A. Kravtsov^{b, c}, M. V. Makarova^{b, c}^,*, M. A. Milyaev^{b, c}, and E. M. Pashaev^a

^aNational Research Center Kurchatov Institute, Moscow, 123182 Russia

^bMikheev lnstitute of Metal Physics of Ural Branch of Russian Academy of Sciences, Ekaterinburg, 620108 Russia

^cUral Federal University named after the first President of the Russia B.N. Yeltsin, Ekaterinburg, 620002 Russia

email: *makarova@imp.uran.ru

Received 13 March, 2024

Abstract— X-ray and magnetometry methods are used to show that, during magnetron sputtering of Dy/Co periodic multilayer systems, the DyCo₂ and DyCo₃ intermetallics form. The main reason for the phase formation of various intermetallics is the structural state of buffer layer, namely, its crystalline and amorphous state in the case of crystalline and glass substrate, respectively.

Keywords: metallic magnetic superlattices, perpendicular magnetic anisotropy, polarizability distribution profiles, X-ray reflectometry and diffractometry

DOI: 10.1134/S0031918X24601318