Chemical Mass Transfer of Indium Oxide and In₂O₃−Me_xO_y Complex Systems

Abstract—An extensive study of the chemical mass transfer of indium oxide and In₂O₃−Me_xO_y systems is performed. The efficiency of C, CO, H₂, Se₂, S₂, In₂S, In₂Se, HI, HBr, HCl, InI₃, InBr₃, InCl₃, I₂, Br₂ and Cl₂ as transport agents for the growth of In₂O₃ crystals by means of the chemical vapor transport (CVT) in the sealed growth chambers is estimated. The CVT system composition and mass transfer are evaluated in the wide temperature range (627−1227°С). It is shown that among the examined substances, Cl₂ is the optimal transport agent for the growth of In₂O₃ crystals with a minimum growth nucleus density. The compositions of Me_xO_y−In₂O₃−Cl₂ CVT systems were calculated for oxides (Me_xO_y) of all non-radioactive metals of the periodic table, taking into account various types of chloride species. The effect of temperature (627−1227°С) on the total pressure and mass transfer rate of doping species (MeCl_n) were investigated. Doping of In₂O₃ by some metal oxides was predicted to be promising and some calculation results are confirmed experimentally.