Effect of the Heat Treatment Mode on the Crystal Structure
and Optical Properties of Tungsten Oxide

A. E. Lapshin^a, V. I. Shapovalov^b, M. Yu. Arsent’ev^a, A. E. Komlev^b, and A. A. Morozova^b

^aGrebenshchikov Institute of Silicate Chemistry, Russian Academy of Sciences, nab. Makarova 2, St. Petersburg, 199034
Russia

e-mail: andrey.e.lapshin@gmail.com

^bLETI St. Petersburg State Electrotechnical University, ul. Prof. Popova 5, St. Petersburg, 197022 Russia

Received January 20, 2015

Abstract—The effect of heat treatment on the crystal structure and optical properties of films of tungsten oxide
WO₃ has been studied. The films have been synthesized on a substrate made of quartz glass by reactive mag-
netron sputtering on a DC. The samples studied contained WO₃ single layers and double layers of the WO₃/TiO₂
and TiO₂/WO₃ type. Each sample passed sequential heat treatments for 1 h: in air at 500C, under vacuum at
700C (residual pressure 5 10^–5 Torr); and in air, at 500C. It was found that at each stage of processing a
polymorphic transition takes place in the WO₃ films, which is affected by the orders of layers on the substrate.

Keywords: film, tungsten oxide, titanium oxide, heterostructure, chemical composition, crystal structure,
annealing, thermochromizm

DOI: 10.1134/S1087659615060085

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