Chemical Composition and Crystal Structure
of Tungsten Oxide Films

V. I. Shapovalov^a, A. E. Lapshin^b, A. G. Gagarin^a, and L. P. Efimenko^b

^aLETI St. Petersburg State Electrotechnical University, ul. Prof. Popova 5, St. Petersburg, 197376 Russia

^bGrebenshchikov Institute of Chemistry of Silicates, Russian Academy of Sciences,
Nab. Makarova 2, St. Petersburg, 199034 Russia

e-mail: vishapovalov@mail.ru

Received November 5, 2013

AbstractThe most typical results of studies on the chemical and phase compositions of the tungsten oxide
films synthesized by different chemical and physical methods, including the films that have undergone addi-
tional thermal treatment in vacuum and in the air, are reviewed.

Keywords: film, tungsten oxide, chemical composition, crystalline structure

DOI: 10.1134/S1087659614050150

Pleiades Publishing home page | journal home page | top

If you have any problems with this server, contact webmaster.