Determination of Optical Constants of Thin Dielectric Films
Using the Spectral Transmission Coefficient

V. I. Shapovalov^a, A. A. Morozova^a, and A. E. Lapshin^b

^aUl’yanov (Lenin) St. Petersburg State Electrotechnical University LETI, ul. Prof. Popova 5, St. Petersburg, 197376, Russia

e-mail: vishapovalov@mail.ru

^bGrebenshchikov Institute of Silicate Chemistry, Russian Academy of Sciences,
nab. Makarova 2, St. Petersburg, 199034, Russia

Received March 1, 2013

Abstract—Based on the developed analytical description of the transmission spectrum in the visible range for
a sample weakly absorbing film–transparent substrate, a technique for calculating the optical constants and
thickness of simple metal oxides has been proposed. The capabilities of the calculation technique are demon-
strated for an X-ray-amorphous film of tungsten oxide.

DOI: 10.1134/S1087659614030195

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