Nanofilms Based on Zirconia and Ceria

P. A. Tikhonov*, M. Yu. Arsent’ev, and M. V. Kalinina

Grebenshchikov Institute of Silicate Chemistry, Russian Academy of Sciences,
nab. Admirala Makarova 2, St. Petersburg, 199034 Russia

*e-mail: ichsran@isc.nw.ru

Received August 24, 2009

Abstract—Nanofilms based on zirconia and ceria have been synthesized using the electron-beam evaporation
method. It has been established that their composition involves a tetragonal solid solution based on zirconia and
weakly crystallized -Al₂O₃ (corundum). The quantitative information concerning the morphology of oxide
nanofilms has been obtained. It has been revealed that the films have a developed surface. The prepared films
can be proposed for the use as resistive sensor chips intended for determining in different media.

Key words: gas sensors, solid electrolytes, rare-earth element oxides

DOI: 10.1134/S1087659610020124

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