Influence of the Initial Zinc Nanolayers Obtained by Magnetron Sputtering on the Properties of Thin Zinc Oxide Films Synthesized on Their Basis by Thermal Oxidation
V. V. Tomaeva, d, *, V. A. Polishchukb, and N. B. Leonovb, c
aSt. Petersburg State Technological Institute (Technical University), St. Petersburg, 190013 Russia
bMakarov State University of Maritime and Inland Shipping, St. Petersburg, 198035 Russia
cITMO University, St. Petersburg, 197101 Russia
dInstitute of Chemistry, St. Petersburg State University, St. Petersburg, 198504 Russia
email: *tvaza@mail.ru
Received 11 November, 2024
Abstract— The morphology, structural features, and optical properties of zinc oxide films of various thicknesses, synthesized by thermal oxidation in an air atmosphere of polycrystalline zinc layers with a thickness of 10, 20, 40, 50, 60, and 80 nm, obtained by magnetron sputtering on glass substrates, are studied. The influence of the thickness of the initial layers and the size of zinc crystals on the characteristics of the crystal structure and properties of the resulting zinc oxide films, as well as the patterns of the approximation of its optical band gap and crystal lattice parameters to the values for bulk zinc oxide (ZnO) crystals with increasing film thickness, are analyzed.
Keywords:
zinc,
zinc oxide,
magnetron sputtering,
thermal oxidation in air,
thin films,
crystal lattice parameters,
optical band gap
DOI: 10.1134/S1087659624601126