The Composition of Solid Products of Si(CH₃)₄ Pyrolysis
on a Hot Tungsten Filament

Yu. M. Grigor’ev*, L. A. Kazanskii*, P. E. Chizhov*, and V. I. Kozlova**

* Institute of Chemical Physics in Chernogolovka, Russian Academy of Sciences, Chernogolovka,
Moscow oblast, 142432 Russia
** Institute of Solid-State Physics, Russian Academy of Sciences, Chernogolovka, Moscow oblast, 142432 Russia

Received January 17, 1996

Abstract—The macrokinetic characteristics of phase formation during pyrolysis of Si(CH₃)₄ on an electrically
heated metal filament were experimentally studied under conditions of high temperature gradients. The struc-
ture and chemical composition of the deposits formed at 300–1900 K were analyzed. The mechanisms of homo-
geneous and heterogeneous processes were discussed.

Pleiades Publishing home page | journal home page | top

If you have any problems with this server, contact webmaster.