rials doped by rare earth ions are considered. The high energy of the primary electron beam, the possibility of
variation of the specific excitation power by orders of magnitude, and the locality of the method allow one to
study transitions, which require radiation with an energy of more than 5 eV to be excited, to study homogeneity
of the dopant distribution with a spatial resolution better than 1
m, and to investigate spectra of radiation emit-ted from various depths by a nondestructive technique. A model is proposed that allows one to evaluate the effi-
ciency of radiative level excitation and the content of luminescent centers. We suggest a new approach to the
investigation of electronic traps in wide-bandgap samples using variation of radiation intensity under stationary
exposure.