Two-Dimensional Electromechanical Waves in Microelectromechanical Structures (MEMS) with a Nanoscale Gap

Abstract—To create microelectromechanical systems (MEMS) with a high specific mechanical power, a system ‘‘movable electrode–nanoscale gap–thin crystalline film made of a material with a high permittivity–immobile electrode’’ is used. It is shown that in this system, two-dimensional electromechanical wave emerge. The emergency of such excitations bounds the limit specific power of electromechanical transducer-actuators, MEMS engines and actuators. However, this phenomenon provides numerous possibilities of application of such structures.