Laser-Plasma Chemistry

S. V. Red’kina, b*

a Mokerov Institute of Ultra-High Frequency Semiconductor Electronics, Russian Academy of Sciences, Moscow, Russia

b Russian Technological University — MIREA, Moscow, Russia

Correspondence to: *e-mail:

Received 14 December, 2021

Abstract—Most currently existing laser methods for separating plates into crystals are analyzed. A technique for eliminating overheating of the substrate, its melting, modification, and release of material to the surface is proposed: local laser-plasma-chemical etching using the example of polycrystalline diamond and single-crystal sapphire. The operating pressure range is 6 × 10–4–1 × 10–1 Torr.

Keywords: laser, plasma-chemical etching, polycrystalline diamond, single-crystal sapphire, plate, crystal

DOI: 10.1134/S2635167622070163