Laser-Plasma Chemistry
S. V. Red’kina, b*
a Mokerov Institute of Ultra-High Frequency Semiconductor Electronics, Russian Academy of Sciences, Moscow, Russia
b Russian Technological University — MIREA, Moscow, Russia
Correspondence to: *e-mail: sergeiredckin@yandex.ru
Received 14 December, 2021
Abstract—Most currently existing laser methods for separating plates into crystals are analyzed. A technique for eliminating overheating of the substrate, its melting, modification, and release of material to the surface is proposed: local laser-plasma-chemical etching using the example of polycrystalline diamond and single-crystal sapphire. The operating pressure range is 6 × 10–4–1 × 10–1 Torr.
Keywords: laser, plasma-chemical etching, polycrystalline diamond, single-crystal sapphire, plate, crystal
DOI: 10.1134/S2635167622070163