V. P. Veiko*, M. V. Jarchuk, and A. I. Ivanov
St. Petersburg National Research University of Information Technologies,
Mechanics and Optics, Kronverkskii pr., 49, St. Petersburg
*e-mail: veiko@lastech.ifmo.ru
Received June 27, 2011; in final form, March 23, 2012; published online July 9, 2012
Abstract—Results of impact on Cr thin metal films by ultrashort laser pulses are investigated in the paper. For
the first time thermochemical action of such pulses is shown and confirmed by analytical approaches (micro-
Raman spectroscopy, CAES and others) and selective chemical etching both. It is impossible to ascribe this
effect to well-known mechanism of heterogeneous diffusion at the irradiation specified conditions. Possible rea-
sons of Cr thin films diffusionless oxidation and structure modification are observed. Discovered phenomena
open up new opportunities for developing of optical thermochemical data recording on Cr thin films, which are
widely used in microelectronics as photomasks and in the process of diffractive optical elements manufactur-
ing.
DOI: 10.1134/S1054660X12080166
Pleiades Publishing home page | journal home page | top
If you have any problems with this server, contact webmaster.