face profiles is described. The device ensures measurements of absolute flatness deviations to an accuracy of
~
/1000 within a wide technological field of ~80 mm (the resolution in the plane is ~0.1 mm).
Interferometric Methods for Surface Testing.
High-Order White-Light Interferometer
I. E. Kozhevatov and E. Kh. Kulikova
Radiophysical Research Institute, Bol’shaya Pecherskaya ul. 25, Nizhni Novgorod, 603600 Russia
Received January 18, 2000; in final form, June 16, 2000
Abstract—A high-order white-light interferometer for three-dimensional fast noncontact testing of optical sur-
face profiles is described. The device ensures measurements of absolute flatness deviations to an accuracy of
~/1000 within a wide technological field of ~80 mm (the resolution in the plane is ~0.1 mm).
Pleiades Publishing home page | journal home page | top
If you have any problems with this server, contact webmaster.