Correction of a Piezoresistive Pressure Sensor Using
a Microcontroller
D.
aponjic´ and A.
igic
Department of Electronics 120, Vinca Institute of Nuclear Sciences, PO Box 522, Belgrade, 11001 Yugoslavia
e-mail: djole@rt270.vin.bg.ac.yu
Received December 23, 1999; in final form, June 21, 2000
AbstractA smart piezoresistive pressure sensor using a microcontroller is described. The microcontroller
ensures temperature compensation and linearization of the sensor, as well as the data exchange. To compensate
for the sensors imperfection, approximation of the sensor inverse response function by a second-order polyno-
mial in terms of pressure and temperature is used. The maximum measurement error with respect to the full
measurement range lies within ±0.1% compared to the ideal sensor response function within the temperature
range of 070°C.
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