Preparation of Nanostructured Thin Films of Yttrium Aluminum Garnet (Y₃Al₅O₁₂) by Sol—Gel Technology

Abstract—The synthesis of hydrolytically active heteroligand coordination compounds [M(C₅H₇O₂)_3 – x(C₅H₁₁Oⁱ)_x] (where M = Al³⁺ and Y³⁺) using aluminum and yttrium acetylacetonates has been studied. The gel formation kinetics in their solutions upon hydrolysis and polycondensation has also been studied. Thin films of a solution of these precursors have been applied to polished sapphire substrates by dip coating. The crystallization of nanostructured yttrium aluminum garnet (Y₃Al₅O₁₂) films during heat treatment of xerogel coatings under various conditions has been studied. How the phase composition, microstructure, and particle size depend on the synthesis parameters has been recognized.