Formation of Impurity Si₂OH₆ in Silane Synthesized
from Silicon Tetrafluoride

A. D. Bulanov, P. G. Sennikov, A. Yu. Sozin, A. Yu. Lashkov, and O. Yu. Troshin

Institute of Chemistry of High Purity Substances, Russian Academy of Sciences,
ul. Tropinina 49, Nizhni Novgorod, 603950 Russia

e-mail: bulanov@ihps.nnov.ru

Received December 22, 2009

Abstract—The possibility of the reduction of hexafluorodisiloxane by calcium hydride in the synthesis of
silane from silicon tetrafluoride has been studied. This reaction is shown to be not decisive for oxygen contam-
ination of silane. The most likely reason for the appearance of impurity Si₂OH₆ in “fluoride” silane is the
Ca(OH)₂-catalyzed reaction of silane with trace water. The concentration of impurity Si₂OH₆ in silane at the
stage of synthesis may be efficiently decreased by the preliminary purging of calcium hydride with a hydrogen
(grade A) flow.

DOI: 10.1134/S0036023611040061

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